|The Cape Peninsula University of Technology (CPUT) Electronic Theses and Dissertations (ETD) repository holds full-text theses and dissertations submitted for higher degrees at the University (including submissions from former Cape Technikon and Peninsula Technikon).|
Browsing Electrical, Electronic and Computer Engineering - Master's Degree by Subject "Microelectromechanical systems"
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(Cape Peninsula University of Technology, 2007)Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different design materials and structures. The benefit ofMEMS technology is in developing devices having lower cost, lower power ...