|The Cape Peninsula University of Technology (CPUT) Electronic Theses and Dissertations (ETD) repository holds full-text theses and dissertations submitted for higher degrees at the University (including submissions from former Cape Technikon and Peninsula Technikon).|
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Micromachined capacitive accelerometer with crab-shape
(Cape Peninsula University of Technology, 2005)
Perhaps more popular than the piezoresistive type are the capacitive type of micromachined accelerometers. The capacitive accelerometer has many fine characteristics, such as simple structure, high sensitivity, strong ...