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Mechanics of micromachined bridge-type accelerometer
Author(s)
Zhang, Rui
Date Issued
2005
Type
Thesis
Publisher
Cape Peninsula University of Technology
Abstract
Having simple structure and high sensitivity, micro accelerometer is a type of
popular transducer used to measure the acceleration in a great variety of conditions.
The bridge-type micro accelerometer is a typical micro accelerometer and has many
types. As one of research project of Kentron in South Africa, the thesis presented
here analyzes the bridge-type capacitive nticro accelerometer (BTCMA) and the
bridge-type micro accelerometer with two piezoelectric thin films read-out
(BTPMA).
In this thesis, the similar structures are used on BTCMA and BTPMA For proving
the fundamental mode of the structure can measure acceleration and utilizing the
structural and electric characteristic to avoid the effect of higher modes, the program
CoventorWare for nticro-electric-mechanical system (MEMS) design and analysis is
used here to analyze the modes of these two structures,
The two group piezoelectric thin films of BTPMA can be connected in serial or
parallel configurations. Integrating piezoelectric effect method, strength method and
energy method, the analytical analysis of these two configurations has been done
with particular emphasis on the elastic characteristics of the thin films. The
analytical formulas of transducer, sensitivity, resonance frequency, noise, quality
factor, ntinimum detectable signal and maximum detectable range are obtained.
According to the comparison results between these two configurations, the charge
output in parallel configuration is a little more than that in serial configuration and
the sensitivity in serial configuration is much higher than that in parallel
configuration. Finally, a calculation of certain practical nticro accelerometer size is
used to prove the above conclusions.
On the base of capacitance theory, strength method and energy method, the
analytical analysis of the BTCMA has been done in this thesis.
popular transducer used to measure the acceleration in a great variety of conditions.
The bridge-type micro accelerometer is a typical micro accelerometer and has many
types. As one of research project of Kentron in South Africa, the thesis presented
here analyzes the bridge-type capacitive nticro accelerometer (BTCMA) and the
bridge-type micro accelerometer with two piezoelectric thin films read-out
(BTPMA).
In this thesis, the similar structures are used on BTCMA and BTPMA For proving
the fundamental mode of the structure can measure acceleration and utilizing the
structural and electric characteristic to avoid the effect of higher modes, the program
CoventorWare for nticro-electric-mechanical system (MEMS) design and analysis is
used here to analyze the modes of these two structures,
The two group piezoelectric thin films of BTPMA can be connected in serial or
parallel configurations. Integrating piezoelectric effect method, strength method and
energy method, the analytical analysis of these two configurations has been done
with particular emphasis on the elastic characteristics of the thin films. The
analytical formulas of transducer, sensitivity, resonance frequency, noise, quality
factor, ntinimum detectable signal and maximum detectable range are obtained.
According to the comparison results between these two configurations, the charge
output in parallel configuration is a little more than that in serial configuration and
the sensitivity in serial configuration is much higher than that in parallel
configuration. Finally, a calculation of certain practical nticro accelerometer size is
used to prove the above conclusions.
On the base of capacitance theory, strength method and energy method, the
analytical analysis of the BTCMA has been done in this thesis.
Additional information
Thesis (MTech (Mechanical Engineering))--Cape Peninsula University of Technology, 2005
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