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Development of a noncontact current sensor based on MEMS technology
Author(s)
Mustafa, Haithem Ali Babiker
Date Issued
2007
Type
Thesis
Publisher
Cape Peninsula University of Technology
Abstract
Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different
design materials and structures. The benefit ofMEMS technology is in developing devices having
lower cost, lower power consumption, higher performance, and integration. A free-end cantileverbeam
made of magnetic material (PerrnaIloy) and a movable mass attached to the free-end has been
designed using MEMS software tools. The magnetic material was used to improve the sensitivity of
the cantilever-beam to an external applied magnetic field. The deflection of the cantilever was detected
using capacitive sensing method. The aim of this research was to develop a non-contact current sensor
based on MEMS technology by analysing the simulation of the system design of the micro cantilever
when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal
current with a constant frequency is applied, the cantilever-beam exhibits a vibration motion
along the vertical axis when it is placed closer to the line current. This creates corresponding capacitance
changes and generates a voltage output proportional to the capacitive change in the signal processing
circuitry attached to the micro cantilever.
Modelling of the magnetic moment of a magnetic cantilever-beam placed in a field, the deflection of
{ the beam, the natural frequency of the cantilever-beam, the maximum deflection, the change in differential
capacitive sensing technique, linearity of the differential capacitive, and capacitive sensitivity
the circuit designed for readout was derived.
design materials and structures. The benefit ofMEMS technology is in developing devices having
lower cost, lower power consumption, higher performance, and integration. A free-end cantileverbeam
made of magnetic material (PerrnaIloy) and a movable mass attached to the free-end has been
designed using MEMS software tools. The magnetic material was used to improve the sensitivity of
the cantilever-beam to an external applied magnetic field. The deflection of the cantilever was detected
using capacitive sensing method. The aim of this research was to develop a non-contact current sensor
based on MEMS technology by analysing the simulation of the system design of the micro cantilever
when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal
current with a constant frequency is applied, the cantilever-beam exhibits a vibration motion
along the vertical axis when it is placed closer to the line current. This creates corresponding capacitance
changes and generates a voltage output proportional to the capacitive change in the signal processing
circuitry attached to the micro cantilever.
Modelling of the magnetic moment of a magnetic cantilever-beam placed in a field, the deflection of
{ the beam, the natural frequency of the cantilever-beam, the maximum deflection, the change in differential
capacitive sensing technique, linearity of the differential capacitive, and capacitive sensitivity
the circuit designed for readout was derived.
Additional information
Thesis (MTech (Technology))--Cape Peninsula University of Technology, 2007
Subjects
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